notesum.ai

Published at November 29

Wafer2Spike: Spiking Neural Network for Wafer Map Pattern Classification

cs.NE

Released Date: November 29, 2024

Authors: Abhishek Mishra¹, Suman Kumar¹, Anush Lingamoorthy¹, Anup Das¹, Nagarajan Kandasamy¹

Aff.: ¹Drexel University

Arxiv: http://arxiv.org/pdf/2411.19422v1

Reference	Model	Split Ratio	Avg. Accuracy	No Pattern	Center	Donut	Edge-Loc	Edge-Ring	Local	Random	Scratch	Near-Full
[5]	CNN	8:2	94%	98%	96%	73%	70%	96%	64%	57%	29%	40%
[5]	SVM [1]^H	8:2	91%	100%	79%	36%	50%	96%	2%	0%	38%	80%
[6]	MC32+MLP	8:2	96%	98%	96%	89%	87%	98%	70%	90%	17%	90%
Ours	$\text{Wafer2Spike}^{2C}$	8:2	95%	97%	99%	98%	69%	96%	75%	99%	47%	100%
Ours	$\text{Wafer2Spike}^{3C}$	8:2	97%	99%	99%	92%	83%	96%	84%	95%	53%	100%
Ours	$\text{Wafer2Spike}^{4C}$	8:2	98%	99%	98%	95%	87%	98%	87%	95%	69%	100%
Ours	$\text{Wafer2Spike}^{4C}$	8:2	98%	$\prescript{F1}{}{99\%}$	$\prescript{F1}{}{99\%}$	$\prescript{F1}{}{94\%}$	$\prescript{F1}{}{88\%}$	$\prescript{F1}{}{99\%}$	$\prescript{F1}{}{89\%}$	$\prescript{F1}{}{95\%}$	$\prescript{F1}{}{55\%}$	$\prescript{F1}{}{77\%}$
[6]	MC32+MLP	7:3	95%	99%	87%	89%	71%	94%	50%	71%	12%	95%
Ours	$\text{Wafer2Spike}^{2C}$	7:3	95%	97%	96%	98%	67%	96%	59%	89%	51%	88%
Ours	$\text{Wafer2Spike}^{3C}$	7:3	97%	99%	98%	98%	85%	97%	81%	93%	46%	100%
Ours	$\text{Wafer2Spike}^{4C}$	7:3	97%	99%	99%	99%	81%	98%	84%	92%	67%	88%
[7]	DMC1	6:1:3	97%	98%	93%	83%	84%	98%	79%	83%	61%	83%
Ours	$\text{Wafer2Spike}^{2C}$	6:1:3	95%	98%	98%	96%	68%	96%	81%	93%	32%	100%
Ours	$\text{Wafer2Spike}^{3C}$	6:1:3	96%	98%	97%	93%	84%	98%	80%	88%	54%	93%
Ours	$\text{Wafer2Spike}^{4C}$	6:1:3	97%	99%	97%	97%	87%	96%	84%	97%	49%	86%
[8]	$P^{2}$ -Net	8:1:1	96%	$\mathbf{\prescript{R}{}{99\%}}$	$\prescript{R}{}{93\%}$	$\prescript{R}{}{81\%}$	$\prescript{R}{}{73\%}$	$\mathbf{\prescript{R}{}{97\%}}$	$\prescript{R}{}{60\%}$	$\prescript{R}{}{91\%}$	$\prescript{R}{}{29\%}$	$\prescript{R}{}{90\%}$
Ours	$\text{Wafer2Spike}^{2C}$	8:1:1	95%	$\prescript{R}{}{98\%}$	$\prescript{R}{}{98\%}$	$\prescript{R}{}{96\%}$	$\prescript{R}{}{70\%}$	$\prescript{R}{}{96\%}$	$\prescript{R}{}{72\%}$	$\mathbf{\prescript{R}{}{98\%}}$	$\prescript{R}{}{42\%}$	$\mathbf{\prescript{R}{}{100\%}}$
Ours	$\text{Wafer2Spike}^{3C}$	8:1:1	97%	$\mathbf{\prescript{R}{}{99\%}}$	$\prescript{R}{}{98\%}$	$\mathbf{\prescript{R}{}{100\%}}$	$\prescript{R}{}{79\%}$	$\mathbf{\prescript{R}{}{97\%}}$	$\mathbf{\prescript{R}{}{86\%}}$	$\prescript{R}{}{92\%}$	$\mathbf{\prescript{R}{}{62\%}}$	$\mathbf{\prescript{R}{}{100\%}}$
Ours	$\text{Wafer2Spike}^{4C}$	8:1:1	97%	$\mathbf{\prescript{R}{}{99\%}}$	$\mathbf{\prescript{R}{}{100\%}}$	$\prescript{R}{}{96\%}$	$\mathbf{\prescript{R}{}{85\%}}$	$\prescript{R}{}{96\%}$	$\mathbf{\prescript{R}{}{86\%}}$	$\mathbf{\prescript{R}{}{98\%}}$	$\prescript{R}{}{54\%}$	$\mathbf{\prescript{R}{}{100\%}}$