notesum.ai
Published at November 17Wafer Map Defect Classification Using Autoencoder-Based Data Augmentation and Convolutional Neural Network
cs.CV
cs.AI
eess.IV
Released Date: November 17, 2024
Authors: Yin-Yin Bao1, Er-Chao Li1, Hong-Qiang Yang1, Bin-Bin Jia1
Aff.: 1College of Electrical Engineering and Information Engineering, Lanzhou University of Technology, Lanzhou, 730050, Gansu, China

| Model | Acc. | Prec. | Recall | F1 | AUC | AP |
|---|---|---|---|---|---|---|
| Logistic Regression | 0.7176 | 0.5172 | 0.5147 | 0.5137 | 0.9345 | 0.5653 |
| SVM | 0.7770 | 0.7627 | 0.7244 | 0.7283 | 0.9638 | 0.8141 |
| Random Forest | 0.8125 | 0.8482 | 0.7090 | 0.7318 | 0.9759 | 0.8476 |
| Voting Classifier | 0.7951 | 0.8050 | 0.7322 | 0.7519 | 0.9709 | 0.8397 |
| CNN-AUG | 0.9856 | 0.9877 | 0.9878 | 0.9877 | 1.0000 | 1.0000 |